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Atomic layer deposition of high-quality Pt thin film as an alternative interconnect replacing Cu File

Han, Seung-Min , Nandi, Dip K. , Joo, Yong-Hwan , Shigetomi, Toshiyuki , Suzuki, Kazuharu , Nabeya, Shunichi , Harada, Ryosuke , Kim, Soo-Hyun

Article Issue Date2020-05 View3
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects File

Kotsugi, Yohei , Han, Seung-Min , Kim, Youn-Hye , Cheon, Taehoon , Nandi, Dip K. , Ramesh, Rahul , Yu, Neung-Kyung , Son, Kirak , Tsugawa, Tomohiro , Ohtake, Shigeyuki , et al

Article Issue Date2021-07 View2
Hydrogen Evolution Reaction by Atomic Layer-Deposited MoNx on Porous Carbon Substrates: The Effects of Porosity and Annealing on Catalyst Activity and Stability File

Ramesh, Rahul , Sawant, Sandesh Y. , Nandi, Dip K. , Kim, Tae Hyun , Kim, Deok Hyun , Han, Seung-Min , Jang, Yujin , Ha, Myoung Gyu , Cho, Moo Hwan , Yoon, Taeho , et al

Article Issue Date2020-08 View4
Selective Atomic Layer Deposition of Metals on Graphene for Transparent Conducting Electrode Application File

Kim, Minsu , Nabeya, Shunichi , Han, Seung-Min , Kim, Min-Sik , Lee, Sangbong , Kim, Hyun-Mi , Cho, Seong-Yong , Lee, Do-Joong , Kim, Soo-Hyun , Kim, Ki-Bum

Article Issue Date2020-03 View4
Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)(6) and NH3 and Its Diffusion Barrier Application File

Tae Hyun Kim , Nandi, Dip K. , Ramesh, Rahul , Han, Seung-Min , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2019-10 View0
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